diff --git a/src/benchmarks/micro/libraries/System.IO.FileSystem/Perf.File.cs b/src/benchmarks/micro/libraries/System.IO.FileSystem/Perf.File.cs
index e242f834bc8..ded2a0470b6 100644
--- a/src/benchmarks/micro/libraries/System.IO.FileSystem/Perf.File.cs
+++ b/src/benchmarks/micro/libraries/System.IO.FileSystem/Perf.File.cs
@@ -94,7 +94,7 @@ public void SetupReadAllBytes()
         {
             // use non-temp file path to ensure that we don't test some unusal File System on Unix
             string baseDir = Environment.GetFolderPath(Environment.SpecialFolder.MyDocuments);
-            File.WriteAllBytes(_testFilePath = Path.Combine(baseDir, Path.GetTempFileName()), Array.Empty<byte>());
+            File.WriteAllBytes(_testFilePath = Path.Combine(baseDir, Path.GetRandomFileName()), Array.Empty<byte>());
             _filesToRead = new Dictionary<int, string>()
             {
                 { HalfKibibyte, WriteBytes(HalfKibibyte) },
@@ -106,7 +106,7 @@ public void SetupReadAllBytes()
 
             string WriteBytes(int fileSize)
             {
-                string filePath = Path.Combine(baseDir, Path.GetTempFileName());
+                string filePath = Path.Combine(baseDir, Path.GetRandomFileName());
                 File.WriteAllBytes(filePath, ValuesGenerator.Array<byte>(fileSize));
                 return filePath;
             }