It's was a long while since I've stopped working on optical lithography simulation. While working on Optolithium I wrote a book: "Optical Lithography Simulation Basics" and tried to publish it though Bauman MSTU publishing house. During do so, I faced with a huge amount of nonsense cricism from like they named "scientists in optics" or "editors" and other stuff. So this activity has been stopped and all drafts lay on shelf. Although I fully understand that lot of knowledge and information here outdated. Looking on slowly growing number of stars in repository I decide to "publish" these drafts as-is on github with the software in hope they can help someone in Russian-speaking community.
Special acknowlegments to my real colleges A. Glushko and V. Marchuk without their help I wouldn't be done these drafts.